Team develops new semiconductor processing technology

Extremely fine porous structures with tiny holes, resembling a kind of sponge at nano level, can be generated in semiconductors. This opens up new possibilities for the realization of tiny sensors or unusual optical and electronic components. There have already been experiments in this area with porous structures made from silicon. Now, researchers at TU Wien have developed a method for the controlled manufacture of porous silicon carbide. Silicon carbide has significant advantages over silicon; it has greater chemical resistance, and can therefore be used for biological applications, for example, without any additional coating required.