{"id":299606,"date":"2017-04-10T06:06:49","date_gmt":"2017-04-10T10:06:49","guid":{"rendered":"https:\/\/ntrs.nasa.gov\/search.jsp?R=20170002899"},"modified":"2017-04-10T06:06:49","modified_gmt":"2017-04-10T10:06:49","slug":"mechanical-stress-measurement-during-thin-film-fabrication","status":"publish","type":"post","link":"https:\/\/spaceweekly.com\/?p=299606","title":{"rendered":"Mechanical Stress Measurement During Thin-Film Fabrication"},"content":{"rendered":"<p>Abstract: A method and system are provided for determining mechanical stress experienced by a film during fabrication thereof on a substrate positioned in a vacuum deposition chamber. The substrate&#8217;s first surface is disposed to have the film deposited thereon and the substrate&#8217;s opposing second surface is a specular reflective surface. A portion of the substrate is supported. An optical displacement sensor is positioned in the vacuum deposition chamber in a spaced-apart relationship with respect to a &#8230;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Abstract: A method and system are provided for determining mechanical stress experienced by a film during fabrication thereof on a substrate positioned in a vacuum deposition chamber. The substrate&#8217;s first surface is disposed to have the film deposited&#8230;<\/p>\n","protected":false},"author":60,"featured_media":615444,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[],"tags":[],"class_list":["post-299606","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/299606","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/users\/60"}],"replies":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=299606"}],"version-history":[{"count":1,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/299606\/revisions"}],"predecessor-version":[{"id":299607,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/299606\/revisions\/299607"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/media\/615444"}],"wp:attachment":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=299606"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=299606"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=299606"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}