{"id":412301,"date":"2017-12-05T09:30:04","date_gmt":"2017-12-05T13:30:04","guid":{"rendered":"http:\/\/spaceweekly.com\/?guid=a1eed8337621e1927827e19b97c653a3"},"modified":"2017-12-05T09:30:04","modified_gmt":"2017-12-05T13:30:04","slug":"record-low-contact-resistivity-on-ga-doped-ge-sourcedrain-contacts-for-pmos-transistors-2","status":"publish","type":"post","link":"https:\/\/spaceweekly.com\/?p=412301","title":{"rendered":"Record low contact resistivity on Ga-doped Ge source\/drain contacts for pMOS transistors"},"content":{"rendered":"<p>At this week&#8217;s 2017 International Electron Devices Meeting (IEDM), imec, the world-leading research and innovation hub in nanoelectronics and digital technology, reports ultralow contact resistivity of 5&#215;10-10\u2126cm2 on Gallium (Ga)-doped p-Germanium (Ge) source\/drain contacts. The low contact resistivity and high level of Ga activation were achieved after nanosecond laser activation (NLA) at low thermal budget. The results show that highly Ga-doped Ge-rich source\/drain contacts provide a promising route for suppressing parasitic source\/drain resistance in advanced pMOS devices.<\/p>\n","protected":false},"excerpt":{"rendered":"<p>At this week&#8217;s 2017 International Electron Devices Meeting (IEDM), imec, the world-leading research and innovation hub in nanoelectronics and digital technology, reports ultralow contact resistivity of 5&#215;10-10&#8486;cm2 on Gallium (Ga)-doped p-Germanium (Ge) source\/drain contacts. The low contact resistivity and high level of Ga activation were achieved after nanosecond laser activation (NLA) at low thermal budget. The results show that highly Ga-doped Ge-rich source\/drain contacts provide a promising route for suppressing parasitic source\/drain resistance in advanced pMOS devices.<\/p>\n","protected":false},"author":0,"featured_media":615444,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[],"tags":[],"class_list":["post-412301","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/412301","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"replies":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=412301"}],"version-history":[{"count":1,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/412301\/revisions"}],"predecessor-version":[{"id":412302,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/412301\/revisions\/412302"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/media\/615444"}],"wp:attachment":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=412301"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=412301"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=412301"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}