{"id":513225,"date":"2018-08-22T05:19:53","date_gmt":"2018-08-22T09:19:53","guid":{"rendered":"https:\/\/ntrs.nasa.gov\/search.jsp?R=20180003963"},"modified":"2018-08-22T05:19:53","modified_gmt":"2018-08-22T09:19:53","slug":"fabrication-and-sub-assembly-of-electrostatically-actuated-silicon-nitride-microshutter-arrays-stub","status":"publish","type":"post","link":"https:\/\/spaceweekly.com\/?p=513225","title":{"rendered":"Fabrication and Sub-Assembly of Electrostatically Actuated Silicon Nitride Microshutter Arrays [STUB]"},"content":{"rendered":"<p>Abstract: We have developed a new microshutter array (MSA) subassembly. The MSA and a silicon substrate are flip-bonded together. The MSA has a new back side fabrication process to actuate the microshutters electrostatically, and the new silicon substrate has light shields. The microshutters with a pixel size of 100 x 200 sq micrometers are fabricated on silicon with thin silicon nitride membranes. The microshutters rotate 90 deg on torsion bars. The selected microshutters are actuated, held, and addre&#8230;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Abstract: We have developed a new microshutter array (MSA) subassembly. The MSA and a silicon substrate are flip-bonded together. The MSA has a new back side fabrication process to actuate the microshutters electrostatically, and the new silicon substr&#8230;<\/p>\n","protected":false},"author":60,"featured_media":615444,"comment_status":"closed","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[],"tags":[],"class_list":["post-513225","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry"],"_links":{"self":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/513225","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/users\/60"}],"replies":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=513225"}],"version-history":[{"count":2,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/513225\/revisions"}],"predecessor-version":[{"id":516660,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/513225\/revisions\/516660"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/media\/615444"}],"wp:attachment":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=513225"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=513225"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=513225"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}