{"id":626719,"date":"2019-08-08T07:30:03","date_gmt":"2019-08-08T11:30:03","guid":{"rendered":"http:\/\/spaceweekly.com\/?p=626719"},"modified":"2019-08-08T07:30:03","modified_gmt":"2019-08-08T11:30:03","slug":"simulated-chemical-vapor-deposition-from-a-tungsten-carbonitride-precursor","status":"publish","type":"post","link":"https:\/\/spaceweekly.com\/?p=626719","title":{"rendered":"Simulated chemical vapor deposition from a tungsten carbonitride precursor"},"content":{"rendered":"<p>Thin films play a key role in the production of electronics. They can be grown directly on a substrate surface through the chemical vapor deposition (CVD) process, which involves a reaction of vapor phase precursor compounds. Based on in situ Raman spectroscopy during simulated CVD in a customized reactor, the decomposition of a tungsten carbonitride precursor was examined under realistic conditions. In the European Journal of Inorganic Chemistry, researchers have proposed a decomposition mechanism.&#013;<br \/>\n&#013;<br \/>\n&#013;<br \/>\n Click here for original story, <a href=\"https:\/\/phys.org\/news\/2019-08-simulated-chemical-vapor-deposition-tungsten.html\" target=\"_blank\" rel=\"nofollow noopener noreferrer\">Simulated chemical vapor deposition from a tungsten carbonitride precursor<\/a>&#013;<br \/>\n&#013;<br \/>\n&#013;<br \/>\nSource: Phys.org&#013;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Thin films play a key role in the production of electronics. They can be grown directly on a substrate surface through the chemical vapor deposition (CVD) process, which involves a&hellip; <\/p>\n","protected":false},"author":1,"featured_media":615444,"comment_status":"false","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[41],"tags":[],"class_list":["post-626719","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-phys-org"],"_links":{"self":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/626719","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=626719"}],"version-history":[{"count":0,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/626719\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/media\/615444"}],"wp:attachment":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=626719"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=626719"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=626719"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}