{"id":734320,"date":"2022-09-06T14:29:46","date_gmt":"2022-09-06T18:29:46","guid":{"rendered":"http:\/\/spaceweekly.com\/?p=734320"},"modified":"2022-09-06T14:29:46","modified_gmt":"2022-09-06T18:29:46","slug":"optical-wafer-defect-inspection-at-the-10-nm-technology-node-and-beyond","status":"publish","type":"post","link":"https:\/\/spaceweekly.com\/?p=734320","title":{"rendered":"Optical wafer defect inspection at the 10 nm technology node and beyond"},"content":{"rendered":"<p>Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and exciting trends on the foundation of former great reviews in the field of defect inspection methods. The review focuses on three specific areas: (1) the defect detectability evaluation, (2) the diverse optical inspection systems, and (3) the post-processing algorithms.&#013;<br \/>\n&#013;<br \/>\n&#013;<br \/>\n Click here for original story, <a href=\"https:\/\/phys.org\/news\/2022-09-optical-wafer-defect-nm-technology.html\" target=\"_blank\" rel=\"nofollow noopener\">Optical wafer defect inspection at the 10 nm technology node and beyond<\/a>&#013;<br \/>\n&#013;<br \/>\n&#013;<br \/>\nSource: Phys.org&#013;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Defect inspection scientists from Huazhong University of Science and Technology, Harbin Institute of Technology and The Chinese University of Hong Kong make a thorough review of new perspectives and exciting&hellip; <\/p>\n","protected":false},"author":1,"featured_media":615444,"comment_status":"false","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[41],"tags":[],"class_list":["post-734320","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-phys-org"],"_links":{"self":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/734320","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=734320"}],"version-history":[{"count":0,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/734320\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/media\/615444"}],"wp:attachment":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=734320"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=734320"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=734320"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}