{"id":754306,"date":"2023-04-26T11:26:13","date_gmt":"2023-04-26T15:26:13","guid":{"rendered":"https:\/\/spaceweekly.com\/?p=754306"},"modified":"2023-04-26T11:26:13","modified_gmt":"2023-04-26T15:26:13","slug":"scientists-improve-near-field-optical-proximity-correction-via-spatial-modulation","status":"publish","type":"post","link":"https:\/\/spaceweekly.com\/?p=754306","title":{"rendered":"Scientists improve near-field optical proximity correction via spatial modulation"},"content":{"rendered":"<p>Researchers led by Prof. Wei Yayi from the University of Chinese Academy of Sciences (UCAS) have improved the final pattern fidelity in near-field nanolithography, a breakthrough in understanding the near-field diffraction limit of an evanescent-field-based patterning system.&#013;<br \/>\n&#013;<br \/>\n&#013;<br \/>\n Click here for original story, <a href=\"https:\/\/phys.org\/news\/2023-04-scientists-near-field-optical-proximity-spatial.html\" target=\"_blank\" rel=\"nofollow noopener\">Scientists improve near-field optical proximity correction via spatial modulation<\/a>&#013;<br \/>\n&#013;<br \/>\n&#013;<br \/>\nSource: Phys.org&#013;<\/p>\n","protected":false},"excerpt":{"rendered":"<p>Researchers led by Prof. Wei Yayi from the University of Chinese Academy of Sciences (UCAS) have improved the final pattern fidelity in near-field nanolithography, a breakthrough in understanding the near-field&hellip; <\/p>\n","protected":false},"author":1,"featured_media":615444,"comment_status":"false","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[41],"tags":[],"class_list":["post-754306","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-phys-org"],"_links":{"self":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/754306","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=754306"}],"version-history":[{"count":0,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/posts\/754306\/revisions"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=\/wp\/v2\/media\/615444"}],"wp:attachment":[{"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=754306"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=754306"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/spaceweekly.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=754306"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}