Scientist uncovers physics behind plasma-etching process

Physicist Igor Kaganovich at the Department of Energy’s (DOE) Princeton Plasma Physics Laboratory (PPPL) and collaborators have uncovered some of the physics that make possible the etching of silicon computer chips, which power cell phones, computers, and a huge range of electronic devices. Specifically, the team found how electrically charged gas known as plasma makes the etching process more effective than it would otherwise be. The research, published in two papers appearing in the September and December 2016 issues of Physics of Plasmas, was supported by the DOE’s Office of Science (FES).