Rhombohedral Super Heteero Epitaxy of Cubic SiGe on Trigonal c-plane Sapphire

Abstract: New rhombohedral super-hetero-epitaxy technology was developed at NASA. This epitaxy technology enables the growth of unprecedented cubic-trigonal hybrid single crystal structures with lattice match on sapphire (Al2O3) substrates, hence with little strain and very few defects at the interface.