Abstract: The high resolution mid-infrared spectrometer (HIRMES) is a high resolving power (R approx. 100,000) instrument operating in the 25-122 micron spectral range and will fly on board the Stratospheric Observatory for Far-Infrared Astronomy (SOFIA) in 2019. Central ot HIRMES are its two transition edge sensor (TES) bolometric cameras, an 8×16 detector high resolution array and a 64×16 detector low resolution array. Both types of detectors consist of MoAu TES fabricated on leg-isolated Si membrane…