New electron glasses sharpen our view of atomic-scale features

What if we could make a powerful scientific tool even better? Atom probe tomography (APT) is a powerful way of measuring interfaces on a scale comparable to the distance between atoms in solids. It also has a chemical sensitivity of less than 10 parts per million. However, it doesn’t work as well as it could. Scientists applied “electron glasses” to correct aberrations in APT data. Now, researchers have an extremely accurate, precise method for measuring the distances between interfaces in vital semiconductor structures. These structures include a silicon (Si) layer sandwiched by a silicon germanium alloy (SiGe).