The ability to pattern materials at ever-smaller sizes—using electron-beam lithography (EBL), in which an electron-sensitive material is exposed to a focused beam of electrons, as a primary method—is driving advances in nanotechnology. When the feature size of materials is reduced from the macroscale to the nanoscale, individual atoms and molecules can be manipulated to dramatically alter material properties, such as color, chemical reactivity, electrical conductivity, and light interactions.