Abstract: The advancement of far-ultraviolet (FUV) coatings is essential to meet the specified throughput requirements of the Large UV/Optical/IR (LUVOIR) Surveyor Observatory which will cover wavelengths down to the 100 nm range. The biggest constraint in the optical thin film coating design is attenuation in the Lyman-Alpha Ultraviolet range of 100-130 nm in which conventionally deposited thin film materials used in this spectral region (e.g. aluminum [Al] protected with Magnesium fluoride [MgF2]) of…