Abstract: Correlative high resolution transmission electron microscopy and energy dispersive X-ray spectroscopy are used to study deformation-induced planar faults in the single crystal superalloy MD2 crept at 800°C and 650 MPa. Segregation of Cr and Co at microtwins, APBs, CISFs/SISFs and CESFs/SESFs is confirmed and quantified. The extent of this is found to depend upon the fault type, being most pronounced for the APB. The CESF/SESF is studied in detail due to its role as a precursor of the microtwi…