Abstract: Secondary Ion mass Spectroscopy (SIMS), as the name suggests, involves characterizing metallic and other materials trough the spectroscopic analysis of secondary ions emanating from the surface of the material to be characterized by the impact of the high energy primary ions. The primary ion source including the choice of its gun, voltage and current can be selected and used depending on the purpose of the analysis. In most instruments more than one primary ion gun is lined up to the sample s…