Abstract: Performance of X-ray reflectors affects that of X-ray mirrors. Modern X-ray mirrors have thousands of reflectors to gain large effective area. Evaluation of the reflectors is an important process in production of the mirrors. A diffraction pattern dominates reflector image when the parallel optical beam illuminates the reflector along its optical axis because the reflectors are used at grazing incident angles of around 1 deg and their effective width are 1–10 mm. A diffraction pattern from th…