Team develops silicon photonic MEMS compatible with semiconductor manufacturing

A team of researchers led by the University of Sydney’s Associate Professor Niels Quack has developed a new technology to combine optics and micro-electro mechanical systems (MEMS) in a microchip, paving the way for the creation of devices like micro-3D cameras and gas sensors for precision air quality measurement, including their use in mobile phones.


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Source: Phys.org