Low-cost technique for etching nanoholes in silicon could underpin new filtration and nanophotonic devices

Metal-assisted chemical etching, or ‘MacEtch’, is used to fabricate a range of nanostructures, but damaging movements of the catalyst during vertical etching processes hamper its wider use. Now, a team led by A*STAR have developed a technique that improves catalyst stability, paving the way for wider application.