Abstract: Recent advances in the physical vapor deposition (PVD) of protective fluoride films have raised the far-ultraviolet (FUV: 912-1600 A) reflectivity of aluminum-based mirrors closer to the theoretical limit. The greatest gains, at more than 20%, have come for lithium fluoride-protected aluminum, which has the shortest wavelength cutoff of any conventional overcoat. Despite the success of the NASA FUSE mission, the use of lithium fluoride (LiF)-based optics is rare, as LiF is hygroscopic and req…