Abstract: Mars Organic Molecule Analyzer – Mass Spectrometer (MOMA-MS) is an instrument in the MOMA instrument suite for the European Space Agency (ESA) ExoMars 2020 Rover. The rover is Planetary Protection Mission Category IVb, the first IVb mission since the Viking missions in the 1970s. Within the sample path of the MOMA instrument suite, the hardware surfaces of the must be sanitized to a level of less than 0.03 spore/m sq. To meet this requirement, the MS sample path was subjected to Dry Heat Micr…